Description
Philips XL-30 FEG SEM with EDS (Noran 6) system is a thermionic field emission SEM which is fully automatic gun configuration controlled by advanced computer technology. The magnification is up to 800,000X with 2 nm resolution. It is easy to use for examining and survey the morphology of the nano devices. This XL30 also equipped with EDS detector to provide the composition. Complete and fully functional, with manuel Software. Chiller is included.Deinstalled on April 21, 2019.Performance Resolution:1.5nm at 10 kV or higher 2.5nm at 1kVElectron Source:Schottky-based thermionic field emission electron gunFully automatic gun configuration controlContinuously variable beam acceleration voltage range 0.2~30KVBeam current range 1pA~25nASpecimen Stage:Eucentric goniometer: 4-axis (X, Y, Z and R ) motorized stage with full manual overrideTilt rage: – 15 ~ 60 degreeDrawer type entry for specimen exchangeSpecimen chamber diameter 284 mmVacuum:Automatic vacuum interlock One diffusion pump (lower chamber), two ion getter pumps (gun chamber)Gun chamber: 2×10-7 PaSpecimen chamber: 2×10-5 PaVacuum regained: < 5 minutesScanning System:Survey mode, scan mode, and scan rotationsMagnification rage: 20-80,0000XAnalytical Capability:Secondary electron (SE) detector Back-scattered electron (BSE) detectorEnergy dispersive X-ray spectrometer (EDS)
